Hydrogen depth profiling with sub-nm resolution in high-resolution ERD

被引：0
|
作者：
Kyoto Univ, Kyoto, Japan [1 ]
机构：
来源：
Nucl Instrum Methods Phys Res Sect B | / 3-4卷 / 397-401期
关键词：
Number:; -; Acronym:; MEXT; Sponsor: Ministry of Education; Culture; Sports; Science and Technology;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Concept of deterministic single ion doping with sub-nm spatial resolution
    J. Meijer
    T. Vogel
    B. Burchard
    I.W. Rangelow
    L. Bischoff
    J. Wrachtrup
    M. Domhan
    F. Jelezko
    W. Schnitzler
    S.A. Schulz
    K. Singer
    F. Schmidt-Kaler
    Applied Physics A, 2006, 83 : 321 - 327
  • [22] Depth strain profile with sub-nm resolution in a thin silicon film using medium energy ion scattering
    Jalabert, D.
    Pelloux-Gervais, D.
    Beche, A.
    Hartmann, J. M.
    Gergaud, P.
    Rouviere, J. L.
    Canut, B.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (02): : 262 - 265
  • [23] HIGH-RESOLUTION SUBBOTTOM PROFILING
    VINE, A
    GEOPHYSICS, 1979, 44 (09) : 1615 - 1615
  • [24] Fiber interferometer combining sub-nm displacement resolution with miniaturized sensor head
    Cheng, Lun-Kai
    Hagen, Ronald A. J.
    Schriek, Lodi N.
    Toet, Peter M.
    van der Togt, Oana
    2017 25TH INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS (OFS), 2017, 10323
  • [25] Microfluidics-based force measurements with sub-nm resolution and sub-pN sensitivity
    Kerkhoff, Yannic
    Block, Stephan
    EUROPEAN BIOPHYSICS JOURNAL WITH BIOPHYSICS LETTERS, 2021, 50 (SUPPL 1): : 60 - 60
  • [26] HIGH-RESOLUTION DEPTH PROFILING OF NITROGEN IN A1N LAYERS
    TERWAGNE, G
    LUCAS, S
    BODART, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 66 (1-2): : 262 - 266
  • [27] High-resolution secondary ion mass spectrometry depth profiling of nanolayers
    Baryshev, Sergey V.
    Zinovev, Alexander V.
    Tripa, C. Emil
    Pellin, Michael J.
    Peng, Qing
    Elam, Jeffrey W.
    Veryovkin, Igor V.
    RAPID COMMUNICATIONS IN MASS SPECTROMETRY, 2012, 26 (19) : 2224 - 2230
  • [28] HIGH-RESOLUTION DEPTH PROFILING OF OXYGEN AND CARBON IN MATERIALS BY SPECTRAL DECONVOLUTION
    SCHULTE, RL
    TRANSACTIONS OF THE AMERICAN NUCLEAR SOCIETY, 1976, 23 (JUN18): : 99 - 100
  • [29] HIGH-RESOLUTION DEPTH PROFILING OF OXYGEN AND CARBON IN MATERIALS BY SPECTRAL DECONVOLUTION
    SCHULTE, RL
    NUCLEAR INSTRUMENTS & METHODS, 1976, 137 (02): : 251 - 256
  • [30] HIGH-RESOLUTION DEPTH PROFILING OF SEMICONDUCTOR STRUCTURES - PRELIMINARY-RESULTS
    DRUMMOND, IW
    DOWSETT, MG
    JAMES, DM
    STREET, FJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 2897 - 2901
12345