Uranium dioxide reaction in CF4/O2 RF plasma

被引:0
|
作者
Kim, Yong-Soo [1 ]
Min, Jin-Young [1 ]
Bae, Ki-Kwang [2 ]
Yang, Myung-Seung [2 ]
机构
[1] Department of Nuclear Engineering, Hanyang Univ., 17 Haengdang-D., Sungdong-Ku, Seoul, Korea, Republic of
[2] Korea Atom. Ener. Research Institute, P.O. Box 7, 305-606, Taejon, Korea, Republic of
来源
Journal of Nuclear Materials | 1999年 / 270卷 / 01期
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页码:253 / 258
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