共 50 条
- [41] Stress relief of tetrahedral amorphous carbon films by postdeposition thermal annealing SURFACE & COATINGS TECHNOLOGY, 1999, 120 : 448 - 452
- [44] Oxidation of amorphous carbon films by ultraviolet light irradiation and thermal annealing Japanese Journal of Applied Physics, 2008, 47 (8 PART 3): : 7002 - 7004