Epitaxial Nd: YAG thin films grown on various substrates by pulsed laser deposition

被引：0
|
作者：
Keio Univ, Yokohama, Japan [1 ]
机构：
来源：
Conf Proc Laser Electr Optic Soc Annu Meet | / 300-301期
关键词：
Crystallinity - Photoluminescence measurements - Pulsed laser deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A high-purity, high-density sintered pellet prepared by mixing appropriate amounts of Y2O3, Al2O3, and Nd2O3, was used as the target for pulsed laser deposition. The KrF excimer laser beam was focused with a lens onto the target. Single-crystal (100)-oriented Si and MgO, (111)-oriented Si, GGG, SGGG and YAG wafers were used as substrates. Finally, the composition and crystallinity were investigated by RBS, XPS and XRD. Additionally, the optical properties of Nd:YAG thin film were investigated by photoluminescence (PL).
引用
收藏
相关论文
共 50 条
  • [41] Formation and properties of carbon nitride thin films by pulsed Nd:YAG laser deposition
    Suda, Y.
    Doi, K.
    Namba, J.
    Imura, F.
    Kawasaki, H.
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2001, 40 (2 B): : 1061 - 1063
  • [42] Growth and annealing effect of SrTiO3 thin films grown by pulsed laser deposition using fourth harmonic Nd:YAG pulsed laser
    Takamura, Koji
    Fujiwara, Takumi
    Yokota, Akinobu
    Nakamura, Motonori
    Yoshimoto, Ken'ichi
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 14 NO 6, 2017, 14 (06):
  • [43] Properties of ZnO Thin Films Grown on Si (100) Substrates by Pulsed Laser Deposition
    Jang, Young Rae
    Yoo, Keon-Ho
    Park, Seung Min
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2010, 26 (11) : 973 - 976
  • [44] Properties of ZnO Thin Films Grown on Si (100) Substrates by Pulsed Laser Deposition
    Young Rae Jang
    Keon-Ho Yoo
    Seung Min Park
    JournalofMaterialsScience&Technology, 2010, 26 (11) : 973 - 976
  • [45] Comparison of ZnO thin films grown by pulsed laser deposition on sapphire and Si substrates
    Han, L.
    Mei, F.
    Liu, C.
    Pedro, C.
    Alves, E.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2008, 40 (03): : 699 - 704
  • [46] Characterization of epitaxial ZnSe films grown by pulsed laser deposition
    Ganguli, T
    Ingale, A
    Vedvyas, M
    Bhattacharya, P
    Kukreja, LM
    Adhi, KP
    Rustagi, KC
    PHYSICS OF SEMICONDUCTOR DEVICES, VOLS 1 AND 2, 1998, 3316 : 1181 - 1184
  • [47] Epitaxial lithium fluoride films grown by pulsed laser deposition
    Tsang, WS
    Mak, CL
    Wong, KH
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (05): : 693 - 696
  • [48] Growth of Nd:YAG films by the pulsed laser deposition method
    Kulesza, S
    Rumianowski, RT
    Rozploch, F
    Dygdala, RS
    SURFACE & COATINGS TECHNOLOGY, 2004, 176 (03): : 385 - 390
  • [49] Epitaxial lithium fluoride films grown by pulsed laser deposition
    W.S. Tsang
    C.L. Mak
    K.H. Wong
    Applied Physics A, 2003, 77 : 693 - 696
  • [50] Pulsed laser deposition of thin films on large substrates
    Acquaviva, S
    Fernández, M
    Leggieri, G
    Luches, A
    Martino, M
    Perrone, A
    ALT'99 INTERNATIONAL CONFERENCE ON ADVANCED LASER TECHNOLOGIES, 2000, 4070 : 215 - 219
12345