Epitaxial Nd: YAG thin films grown on various substrates by pulsed laser deposition

A high-purity, high-density sintered pellet prepared by mixing appropriate amounts of Y2O3, Al2O3, and Nd2O3, was used as the target for pulsed laser deposition. The KrF excimer laser beam was focused with a lens onto the target. Single-crystal (100)-oriented Si and MgO, (111)-oriented Si, GGG, SGGG and YAG wafers were used as substrates. Finally, the composition and crystallinity were investigated by RBS, XPS and XRD. Additionally, the optical properties of Nd:YAG thin film were investigated by photoluminescence (PL).