Study of third- and fifth-order intrinsic geometric aberrations for Hutter's electrostatic lens

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作者
Liu, Zhixiong [1 ]
Ximen, Jiye [1 ]
机构
[1] Peking Univ, Beijing, China
来源
Chinese Journal of Electronics | 1999年 / 8卷 / 04期
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页码:335 / 339
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