Vibration control of a microactuator for servo application by active damping

被引：0
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作者：
Hirano, Toshiki [1 ,2 ]
机构：
[1] IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120, United States
[2] Hitachi Global Strage Technologies, San Jose Research Center, 650 Harry Road, San Jose, CA 95120, United States
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 03期
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页码：1486 / 1490
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