Time-Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma Generated by Ring-Slot Antenna

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作者：
机构：
[1] Murohashi, Hiroyuki
[2] Okamoto, Tetsu
[3] 1,Okamoto, Yukio
来源：
Okamoto, Y. (okamoto@eng.toyo.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 42期
关键词：
Argon - Microwaves - Plasma density - Pulse modulation - Substrates - Surface waves;
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摘要：
Time-resolved probe measurements of the electron energy distribution function (EEDF) in a substrate (wafer) holder were performed in a pulse-modulated argon plasma of high density (>1011/cm 3), low electron temperature (
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