Anomalies in the growth temperature and time dependence of carbon nanotube growth

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作者
Jeong, Hee Jin [1 ]
Shin, Young Min [1 ]
Jeong, Seung Yol [1 ]
Choi, Young Chul [1 ]
Park, Young Soo [1 ]
Lim, Seong Chu [1 ]
Park, Gyeong-Su [1 ]
Han, In-Taek [1 ]
Kim, Jong Min [1 ]
Lee, Young Hee [1 ]
机构
[1] Department of Physics, Center for NNC, Sungkyunkwan University, Suwon 440-746, Korea, Republic of
关键词
Atomic force microscopy - High resolution electron microscopy - Nickel - Plasma enhanced chemical vapor deposition - Scanning electron microscopy - Semiconducting silicon - Thin films;
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摘要
Communication: The synthesis of multi-walled carbon nanotubes (CNTs) on a Ni coated Si substrate is reported. The CNTs grown at 650 deg;C (see Figure) were found to be uniformly aligned with high tube density-Increasing decomposition temperature resulted in less alignment and lower tube density CNTs. It is concluded that the diameter, alignment, and density of CNTs are closely related to the surface morphology of the Ni thin film substrate.
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页码:11 / 15
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