Metallization of sub-micron trenches and vias with high aspect ratio

被引：0
|
作者：
Siemroth, P. [1 ]
Wenzel, Ch. [1 ]
Klimes, W. [1 ]
Schultrich, B. [1 ]
Schuelke, T. [1 ]
机构：
[1] Fraunhofer-Inst for Material and, Beam Technology (IWS), Dresden, Germany
来源：
| 1997年 / Elsevier Science S.A., Lausanne, Switzerland卷 / 308-309期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Application of Self-Assembled Monolayers to the Electroless Metallization of High Aspect Ratio Vias for Microelectronics
    Bernasconi, R.
    Molazemhosseini, A.
    Cervati, M.
    Armini, S.
    Magagnin, L.
    JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (10) : 5449 - 5455
  • [32] Single-pulse multiphoton fabrication of high aspect ratio structures with sub-micron features using vortex beams
    Benjamin Mills
    Dmytro Kundys
    Maria Farsari
    Sakellaris Mailis
    Robert W. Eason
    Applied Physics A, 2012, 108 : 651 - 655
  • [33] Single-pulse multiphoton fabrication of high aspect ratio structures with sub-micron features using vortex beams
    Mills, Benjamin
    Kundys, Dmytro
    Farsari, Maria
    Mailis, Sakellaris
    Eason, Robert W.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2012, 108 (03): : 651 - 655
  • [34] Application of Self-Assembled Monolayers to the Electroless Metallization of High Aspect Ratio Vias for Microelectronics
    R. Bernasconi
    A. Molazemhosseini
    M. Cervati
    S. Armini
    L. Magagnin
    Journal of Electronic Materials, 2016, 45 : 5449 - 5455
  • [35] Al-free Nanolayered Metallization Systems for Sub-micron HEMTs
    Kolaklieva, L.
    Chitanov, V.
    Kakanakov, R.
    JOURNAL OF NANO RESEARCH, 2012, 17 : 203 - 210
  • [36] Electron heating and radiation in high aspect ratio sub-micron plasma generated by an ultrafast Bessel pulse within a solid dielectric
    Ardaneh, Kazem
    Giust, Remo
    Charpin, Pierre-Jean
    Morel, Benoit
    Courvoisier, Francois
    EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS, 2023, 232 (13): : 2247 - 2252
  • [37] Fabrication of a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers
    Zeng, Yongbin
    Wang, Yufeng
    Qu, Ningsong
    Zhu, Di
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (09):
  • [38] Electron heating and radiation in high aspect ratio sub-micron plasma generated by an ultrafast Bessel pulse within a solid dielectric
    Kazem Ardaneh
    Remo Giust
    Pierre-Jean Charpin
    Benoit Morel
    Francois Courvoisier
    The European Physical Journal Special Topics, 2023, 232 : 2247 - 2252
  • [39] SUB SUB-MICRON TURNING
    GETTELMAN, K
    MODERN MACHINE SHOP, 1984, 56 (11) : 50 - 55
  • [40] SUB SUB-MICRON TURNING
    GETTELMAN, K
    INDUSTRIAL DIAMOND REVIEW, 1985, 45 (02): : 66 - 66
12345