Metallization of sub-micron trenches and vias with high aspect ratio

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作者：
Siemroth, P. [1 ]
Wenzel, Ch. [1 ]
Klimes, W. [1 ]
Schultrich, B. [1 ]
Schuelke, T. [1 ]
机构：
[1] Fraunhofer-Inst for Material and, Beam Technology (IWS), Dresden, Germany
来源：
| 1997年 / Elsevier Science S.A., Lausanne, Switzerland卷 / 308-309期
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