Characterization of highly strained silicon-germanium alloys grown on silicon substrates using spectroscopic ellipsometry

被引：0

作者：

Lee, Hosun ^{[1
]}

机构：

[1] Kyung Hee Univ, Suwon, Korea, Republic of

来源：

Thin Solid Films | 1998年 / 313-314卷 / 1-2期

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摘要：

引用

页码：167 / 171

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