Characterization of highly strained silicon-germanium alloys grown on silicon substrates using spectroscopic ellipsometry

被引：0
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作者：
Lee, Hosun [1 ]
机构：
[1] Kyung Hee Univ, Suwon, Korea, Republic of
来源：
Thin Solid Films | 1998年 / 313-314卷 / 1-2期
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摘要：
14
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页码：167 / 171
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