Optimization of the refractory x-ray mask fabrication sequence

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作者：
Cummings, K.D.
Dauksher, W.J.
Johnson, W.A.
Laudon, M.F.
Engelstad, R.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1996年 / 14卷 / 06期
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