Microstructure and properties of annealed ZnO thin films deposited by magnetron sputtering

被引：0
|
作者：
Lee, J. [1 ]
Gao, W. [2 ]
Li, Z. [2 ]
Hodgson, M. [2 ]
Asadov, A. [2 ]
Metson, J. [3 ]
机构：
[1] Department of Mechanical Engineering, University of Auckland, Auckland 1004, New Zealand
[2] Department of Chemical and Materials Engineering, University of Auckland, Auckland 1004, New Zealand
[3] Department of Chemistry, University of Auckland, Private Bag 92019, New Zealand
来源：
Acta Metallurgica Sinica (English Letters) | 2005年 / 18卷 / 03期
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摘要：
Thin films
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页码：177 / 183
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