A profilometer for synchrotron radiation mirrors

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Department of Physics, Faculty of Science, Tohoku University, Aobaku, Sendai 980-77, Japan [1 ]
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J Electron Spectrosc Relat Phenom | / 481-484期
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This work was supportedb y a Grant-in-aid for Scientific Researcho n Priority Areas; X-Ray ImagingO ptics; C ontactN o.0321710f3r om the Ministryo f EducationS; ciencea nd Culture; Japan. Developmenwta s also supportedin part by the Director'sR & D SupportingP rogramfo r futurea cceleratoprr ojectsin KEK;
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