The structure of complex thin-film systems from ellipsometric simulation: A PbI2-Cu photoresist

被引：0
|
作者：
Sopinskij, N.V.
机构：
来源：
Mikroelektronika | 2001年 / 30卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：41 / 47
相关论文
共 50 条
  • [1] The Structure of Complex Thin-Film Systems from Ellipsometric Simulation: A PbI2-Cu Photoresist
    Sopinskii N.V.
    Russian Microelectronics, 2001, 30 (1) : 35 - 39
  • [2] Ellipsometric study of the photodoping effect in the thin-film structure PbI2-Cu
    Sopinskij, N.V.
    Avtometriya, 1997, (01): : 106 - 112
  • [3] Kinetics of photoinduced conversions in a thin-layer photosensitive PbI2-Cu structure
    Sopinskii, NV
    Indutnyi, IZ
    Gusev, MY
    ZHURNAL NAUCHNOI I PRIKLADNOI FOTOGRAFII, 1996, 41 (01): : 32 - 39
  • [4] An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure
    A. A. Tikhii
    V. A. Gritskikh
    S. V. Kara-Murza
    N. V. Korchikova
    Yu. M. Nikolaenko
    V. V. Faraponov
    I. V. Zhikharev
    Optics and Spectroscopy, 2015, 119 : 268 - 272
  • [5] An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure
    Tikhii, A. A.
    Gritskikh, V. A.
    Kara-Murza, S. V.
    Korchikova, N. V.
    Nikolaenko, Yu. M.
    Faraponov, V. V.
    Zhikharev, I. V.
    OPTICS AND SPECTROSCOPY, 2015, 119 (02) : 268 - 272
  • [6] Ellipsometric characterization of PbI2 thin film on glass
    Ahmad, A.
    Saq'an, S.
    Lahlouh, B.
    Hassan, M.
    Alsaad, A.
    El-Nasser, H.
    PHYSICA B-CONDENSED MATTER, 2009, 404 (01) : 1 - 6
  • [7] MODELING OF THE THIN-FILM STRUCTURE FOR THE PURPOSE OF ELLIPSOMETRIC MEASUREMENTS
    WOZNICKA, G
    KRUSZEWSKI, J
    GUTKOWSKI, MT
    OPTICA APPLICATA, 1993, 23 (04) : 275 - 280
  • [8] ELLIPSOMETRIC STUDIES OF OXIDATION AND REDUCTION PROCESSES IN THIN-FILM SYSTEMS
    ORD, JL
    HUANG, ZQ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C113 - C113
  • [9] Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure
    Hlubina, Petr
    Ciprian, Dalibor
    Lunacek, Jiri
    OPTICS LETTERS, 2009, 34 (17) : 2661 - 2663
  • [10] Simulation of intensity of a patterned thin-film structure
    Li, Ya-Ping
    Lee, Cheng-Chung
    APPLIED OPTICS, 2007, 46 (12) : 2244 - 2247
12345