An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure

被引：5
|
作者：
Tikhii, A. A. [2 ]
Gritskikh, V. A. [1 ]
Kara-Murza, S. V. [1 ]
Korchikova, N. V. [1 ]
Nikolaenko, Yu. M. [2 ]
Faraponov, V. V. [2 ]
Zhikharev, I. V. [2 ]
机构：
[1] Shevchenko Univ, UA-91011 Lugansk, Ukraine
[2] Natl Acad Sci Ukraine, Galkin Physicotech Inst, UA-83114 Donetsk, Ukraine
来源：
OPTICS AND SPECTROSCOPY | 2015年 / 119卷 / 02期
关键词：
Intermediate Layer; Optical Parameter; Film Boundary; Ellipsometric Measurement; Ellipsometric Angle;
D O I：
10.1134/S0030400X15080238
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A method for taking into account the complex structure of single-layer thin-film coatings, which is formed due to the effect of interfaces between the film and surrounding media, for solving the inverse problem of ellipsometry by a modified Malin-Vedam method is proposed and the features of its application are described. As an example, this method is used to interpret the results of ellipsometric measurements of a close-to-stoichiometric polycrystalline La0.7Sr0.3MnO3 film on a crystalline Al2O3 (LSMO/AO) substrate.
引用
收藏
页码：268 / 272
页数：5
相关论文
共 50 条
  • [1] An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure
    A. A. Tikhii
    V. A. Gritskikh
    S. V. Kara-Murza
    N. V. Korchikova
    Yu. M. Nikolaenko
    V. V. Faraponov
    I. V. Zhikharev
    Optics and Spectroscopy, 2015, 119 : 268 - 272
  • [2] The photothermal method for testing of parameters of thin-film coatings
    Petrovska, H
    Demkovych, I
    Bobitski, Y
    CAOL 2005: PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON ADVANCED OPTOELECTRONICS AND LASERS, VOL 2, 2005, : 290 - 293
  • [3] METHOD OF DETERMINING THE REFRACTIVE INDEX OF THIN-FILM COATINGS.
    Timoshin, I.A.
    Panteleev, G.V.
    Soviet Journal of Optical Technology (English translation of Optiko-Mekhanicheskaya Promyshlennost), 1976, 43 (05): : 325 - 326
  • [4] THIN-FILM OPTICAL COATINGS
    MACLEOD, HA
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 387 : 28 - 35
  • [5] NEW SYNTHESIS METHOD FOR OPTICAL THIN-FILM COATINGS
    CASE, WE
    APPLIED OPTICS, 1983, 22 (24): : 4111 - 4117
  • [6] Ellipsometric Technique for Estimating the Thickness Nonuniformity of Thin-Film Coatings
    Baturin, A. S.
    Bormashov, V. S.
    Gavrilenko, V. P.
    Zablotskii, A. B.
    Zaitsev, S. A.
    Kuzin, A. Yu.
    Todua, P. A.
    Filippov, M. N.
    MEASUREMENT TECHNIQUES, 2014, 56 (11) : 1224 - 1232
  • [7] Ellipsometric Technique for Estimating the Thickness Nonuniformity of Thin-Film Coatings
    A. S. Baturin
    V. S. Bormashov
    V. P. Gavrilenko
    A. B. Zablotskii
    S. A. Zaitsev
    A. Yu. Kuzin
    P. A. Todua
    M. N. Filippov
    Measurement Techniques, 2014, 56 : 1224 - 1232
  • [8] MODELING OF THE THIN-FILM STRUCTURE FOR THE PURPOSE OF ELLIPSOMETRIC MEASUREMENTS
    WOZNICKA, G
    KRUSZEWSKI, J
    GUTKOWSKI, MT
    OPTICA APPLICATA, 1993, 23 (04) : 275 - 280
  • [9] SYNTHESIZED THIN-FILM OPTICAL COATINGS
    FURMAN, SA
    OPTIKA I SPEKTROSKOPIYA, 1985, 58 (05): : 1143 - 1146
  • [10] METHOD FOR DETERMINING THE OPTICAL-CONSTANTS OF A THIN-FILM ON A TRANSPARENT SUBSTRATE
    MINKOV, DA
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (01) : 199 - 205
12345