Ion-beam deposition with positive and negative ions

被引：0
|
作者：
Fujii, K. [1 ]
Horino, Y. [1 ]
Tsubouchi, N. [1 ]
Enders, B. [1 ]
Chayahara, A. [1 ]
Kinomura, A. [1 ]
机构：
[1] Osaka Natl Research Inst, Osaka, Japan
来源：
Surface and Coatings Technology | 1996年 / 84卷 / 1 -3 pt 2期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：544 / 549
相关论文
共 50 条
  • [31] COLLISIONLESS HEATING OF PLASMA IONS BY AN ION-BEAM
    KIRICHENKO, GS
    KHMARUK, VG
    ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1972, 63 (01): : 107 - +
  • [32] ION-BEAM ASSISTED DEPOSITION OF TUNGSTEN ON GAAS
    XU, Z
    KOSUGI, T
    GAMO, K
    NAMBA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (01): : L23 - L26
  • [33] FOCUSED ION-BEAM INDUCED DEPOSITION OF PLATINUM
    TAO, T
    RO, JS
    MELNGAILIS, J
    XUE, ZL
    KAESZ, HD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1826 - 1829
  • [34] ION-BEAM ASSISTED DEPOSITION OF OPTICAL COATINGS
    STELMACK, LA
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1989, 44 (245): : 45 - 58
  • [35] ION-BEAM DEPOSITION OF A-SI-H
    CEASAR, GP
    GRIMSHAW, SF
    OKUMURA, K
    SOLID STATE COMMUNICATIONS, 1981, 38 (02) : 89 - 93
  • [36] ION-BEAM ASSISTED DEPOSITION OF INSULATING LAYERS
    WOLF, GK
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 65 (1-4): : 107 - 114
  • [37] FOCUSED ION-BEAM INDUCED DEPOSITION OF GOLD
    SHEDD, GM
    LEZEC, H
    DUBNER, AD
    MELNGAILIS, J
    APPLIED PHYSICS LETTERS, 1986, 49 (23) : 1584 - 1586
  • [38] Ion-beam deposition of tourmaline film on glass
    Liu, S. M.
    Li, D. C.
    Hu, W. T.
    Qin, G. Q.
    Li, L. F.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (12-13) : 1444 - 1446
  • [39] PHYSICAL ASPECTS OF ION-BEAM ASSISTED DEPOSITION
    HUBLER, GK
    CAROSELLA, CA
    DONOVAN, EP
    VANVECHTEN, D
    BASSEL, RH
    ANDREADIS, TD
    ROSEN, M
    MUELLER, GP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4): : 384 - 391
  • [40] ION-BEAM INTERACTIONS WITH SURFACES AND DEPOSITION PROCESSES
    RIGSBEE, JM
    JOURNAL OF METALS, 1987, 39 (10): : A56 - A56
12345