共 50 条
- [21] ECWR plasma enhanced chemical vapour deposition of microcrystalline silicon thin films. 13TH HIGH-TECH PLASMA PROCESSES CONFERENCE (HTPP-2014), 2014, 550
- [23] Low-temperature chemical vapor deposition of titanium nitride thin films. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 219 : U831 - U831