NOVEL SUBMICROMETER MOS DEVICES BY SELF-ALIGNED NITRIDATION OF SILICIDE.

被引：0
|
作者：
Kaneko, Hiroko [1 ]
Koyanagi, Mitsumasa [1 ]
Shimizu, Shinji [1 ]
Kubota, Yukiko [1 ]
Kishino, Seigo [1 ]
机构：
[1] Hitachi Ltd, Ome, Jpn, Hitachi Ltd, Ome, Jpn
来源：
IEEE Transactions on Electron Devices | 1986年 / ED-33卷 / 11期
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摘要：
17
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页码：1702 / 1709
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