DEVELOPMENT OF A HIGH THERMAL CONDUCTIVE AlN CERAMIC SUBSTRATE TECHNOLOGY.

被引：0
|
作者：
Iwase, Nobuo [1 ]
Tsuge, Akihiko [1 ]
Sugiura, Yasuyuki [1 ]
机构：
[1] Toshiba R&D Cent, Kawasaki, Jpn, Toshiba R&D Cent, Kawasaki, Jpn
来源：
International Journal of Microcircuits and Electronic Packaging | 1984年 / 7卷 / 04期
关键词：
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摘要：
INTEGRATED CIRCUIT MANUFACTURE
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页码：49 / 53
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