In-situ characterization of Si surface oxidation by high-sensitivity infrared reflection spectroscopic method

被引：0
|
作者：
Nishida, Masahiro [1 ]
Matsui, Yuichi [1 ]
Okuyama, Masanori [1 ]
Hamakawa, Yoshihiro [1 ]
机构：
[1] Osaka Univ, Osaka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 1 B期
关键词：
Semiconducting silicon;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：286 / 289
相关论文
共 50 条
  • [21] IN-SITU INFRARED REFLECTANCE SPECTROSCOPIC INVESTIGATION OF OXIDE ON THE SURFACE OF GLASSY CARBON ELECTRODE
    Yang Yong
    Cao Shuojing
    Lin Zugeng
    ACTA PHYSICO-CHIMICA SINICA, 1989, 5 (05) : 513 - 515
  • [22] IN-SITU OBSERVATION OF PHOTODOPING PROCESS BY INFRARED ATTENUATED TOTAL-REFLECTION METHOD
    LEE, J
    OGAWA, T
    WAKAKI, M
    UEHARA, F
    ARAI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (08): : 4773 - 4778
  • [23] In situ compensation method for high-precision and high-sensitivity integral magnetometry
    Gas, Katarzyna
    Sawicki, Maciej
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2019, 30 (08)
  • [24] Diagnostics of hydrogen role in the Si surface reaction processes employing in-situ Fourier transform infrared-attenuated total reflection
    Kawamura, Kohei, 1600, (30):
  • [25] EX-SITU AND IN-SITU CHARACTERIZATION OF SURFACTANT MONOLAYERS ADSORBED ON NONMETALLIC SUBSTRATE BY INFRARED REFLECTION SPECTROSCOPY
    MIELCZARSKI, JA
    SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 162 - 166
  • [26] IN-SITU INFRARED STUDY OF CHEMICAL-STATE OF SI SURFACE IN ETCHING SOLUTION
    NIWANO, M
    KIMURA, Y
    MIYAMOTO, N
    APPLIED PHYSICS LETTERS, 1994, 65 (13) : 1692 - 1694
  • [27] In-situ optical reflection measurement of a Si(100) surface under hydrogen ion irradiation
    Yoshida, T
    Sakai, M
    Tanabe, T
    MATERIALS TRANSACTIONS, 2004, 45 (07) : 2018 - 2022
  • [28] AN In-Situ FTIR REFLECTION-ABSORPTION SPECTROSCOPIC STUDY OF WATER ON AND NEAR Pt ELECTRODE SURFACE
    Zhang Jiujun
    Lu Juntao
    Zha Chuansin
    Feng Zigang
    ACTA PHYSICO-CHIMICA SINICA, 1990, 6 (03) : 318 - 322
  • [29] Optimization of in-situ electro-oxidation of formaldehyde by the response surface method
    Saravanathamizhan, R.
    Soloman, P. A.
    Balasubramanian, N.
    Basha, C. Ahmed
    CHEMICAL AND BIOCHEMICAL ENGINEERING QUARTERLY, 2008, 22 (02) : 213 - 220
  • [30] IN-SITU INFRARED STUDY OF SURFACE OXIDE FORMATION ON GAS-EVAPORATED SI MICROCRYSTALS
    HAYASHI, S
    KAWATA, S
    KIM, HM
    YAMAMOTO, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (11A): : 4870 - 4877
12345