ELECTRON CHANNELING IN THE SCANNING ELECTRON MICROSCOPE FOR MONITORING THE THICKNESSES OF RESIDUAL OXIDE FILMS ON SEMICONDUCTOR SUBSTRATES.

被引：0

作者：

Vinogradova, N.S. ^{[1
]}

Nosikov, S.V. ^{[1
]}

Sorokin, I.N. ^{[1
]}

Sosnovskikh, Yu.N. ^{[1
]}

机构：

[1] Moscow Electronic Engineering Inst, USSR, Moscow Electronic Engineering Inst, USSR

来源：

| 1600年 / 52期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

MICROSCOPIC EXAMINATION

引用

共 50 条

[21] A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets
Lopez de la Rosa, Francisco
Gomez-Sirvent, Jose L.
Morales, Rafael
Sanchez-Reolid, Roberto
Fernandez-Caballero, Antonio
APPLIED SOFT COMPUTING, 2022, 131
[22] MEASUREMENT OF THIN FILM THICKNESSES IN NORMALLY INACCESSIBLE LOCATIONS WITH SCANNING ELECTRON MICROSCOPE
FLOYD, SR
ANSTEAD, RJ
REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (06): : 824 - &
[23] Fundamental and experimental aspects of diffraction for characterizing dislocations by electron channeling contrast imaging in scanning electron microscope
Kriaa, H.
Guitton, A.
Maloufi, N.
SCIENTIFIC REPORTS, 2017, 7
[24] Fundamental and experimental aspects of diffraction for characterizing dislocations by electron channeling contrast imaging in scanning electron microscope
H. Kriaa
A. Guitton
N. Maloufi
Scientific Reports, 7
[25] APPLICATION OF A HIGH-VOLTAGE SCANNING ELECTRON-MICROSCOPE FOR ELECTRON CHANNELING PATTERN-ANALYSIS
WATANABE, E
YAMAMOTO, T
JOURNAL OF MATERIALS SCIENCE, 1978, 13 (11) : 2519 - 2523
[26] RASTER SCANNING ELECTRON-MICROSCOPE FOR MINUTE SEMICONDUCTOR STRUCTURES
不详
INTERNATIONALE ELEKTRONISCHE RUNDSCHAU, 1973, 27 (02): : 32 - 32
[27] Measurement of semiconductor surface potential using the scanning electron microscope
Heath, Jennifer T.
Jiang, Chun-Sheng
Al-Jassim, Mowafak M.
JOURNAL OF APPLIED PHYSICS, 2012, 111 (04)
[28] APPLICATION OF SCANNING ELECTRON MICROSCOPE TO STUDY OF RUST FILMS
GALLAGHE.WP
CORROSION, 1969, 25 (12) : 15 - &
[29] APPLICATION OF SCANNING ELECTRON MICROSCOPE TO STUDY OF RUST FILMS
GALLAGHE.WP
MATERIALS PROTECTION, 1969, 8 (12): : 58 - &
[30] Scanning electron microscope observation of dislocations in semiconductor and metal materials
Kuwano, Noriyuki
Itakura, Masaru
Nagatomo, Yoshiyuki
Tachibana, Shigeaki
JOURNAL OF ELECTRON MICROSCOPY, 2010, 59 : S175 - S181

← 1 2 3 4 5 →