Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100)

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Lie, D.Y.C.

Theodore, N.D.

Song, J.H.

Nicolet, M.-A.

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| 1600年 / American Inst of Physics, Woodbury, NY, USA卷 / 77期

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