Studies of transparent conductive ZnO:Al nanofilms

被引：0
|
作者：
Lu, Feng [1 ,2 ]
Xu, Chenghai [1 ]
Cao, Hongtao [2 ]
Pei, Zhiliang [2 ]
Sun, Chao [2 ]
Wen, Lishi [2 ]
机构：
[1] Sch. of Mech. Eng. and Automat., Northeastern Univ., Shenyang 110004, China
[2] Inst. of Metal Res., Chinese Acad. of Sci., Shenyang 110015, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology | 2003年 / 23卷 / 01期
关键词：
DC reactive magnetron sputtering - Wurtzite structure;
D O I：
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学科分类号：
摘要：
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页码：9 / 11
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