Electron beam backscattering effect in multilayer materials

被引：0
|
作者：
Wang, Chuanshan [1 ]
Zhou, Shuxin [1 ]
Luo, Wenyun [1 ]
Xu, Mengjie [1 ]
Lu, Yuqing [1 ]
机构：
[1] Shanghai Univ of Science and, Technology, Shanghai, China
来源：
He Jishu/Nuclear Techniques | 1995年 / 18卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：166 / 169
相关论文
共 50 条
  • [21] Electron backscattering diffraction investigation of focused ion beam surfaces
    T. L. Matteson
    S. W. Schwarz
    E. C. Houge
    B. W. Kempshall
    L. A. Giannuzzi
    Journal of Electronic Materials, 2002, 31 : 33 - 39
  • [22] Effects of backscattering on one-dimensional electron beam transport
    Andersson, F
    Smith, H
    Anderson, D
    Lisak, M
    Helander, P
    NUCLEAR SCIENCE AND ENGINEERING, 2002, 142 (02) : 150 - 157
  • [23] RAMAN BACKSCATTERING FROM ELECTRON BEAM-DIELECTRIC RESONATORS
    WALSH, JE
    ARION, D
    BUSBY, K
    FELCH, K
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1979, 24 (08): : 1076 - 1076
  • [24] Electron backscattering diffraction investigation of focused ion beam surfaces
    Matteson, TL
    Schwarz, SW
    Houge, EC
    Kempshall, BW
    Giannuzzi, LA
    JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (01) : 33 - 39
  • [25] EFFECTS OF A COLD ELECTRON-BEAM ON BRILLOUIN BACKSCATTERING IN A PLASMA
    WILLETT, JE
    AKTAS, Y
    PLASMA PHYSICS AND CONTROLLED FUSION, 1984, 26 (06) : 837 - 840
  • [26] SCOPE FOR IDENTIFYING MATERIALS IN MULTILAYER STRUCTURES BY GAMMA-RAY BACKSCATTERING METHODS
    GOLIKOV, EG
    VASNIN, GM
    KOVYAZIN, YA
    KHARITONOV, YS
    ZAKATOV, MM
    FEKHARDINOV, VN
    SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR, 1985, 21 (07): : 497 - 501
  • [27] CHARACTERIZATION OF MULTILAYER MICROSTRUCTURES AND SURFACE-RELIEF IN BACKSCATTERING ELECTRON MODE OF SEM
    DRYOMOVA, NN
    DROKIN, AP
    ZAITZEV, SI
    RAU, EI
    YAKOMOV, EB
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1993, 57 (08): : 9 - 14
  • [28] Electron beam ablation of materials
    Kovaleski, SD
    Gilgenbach, RM
    Ang, LK
    Lau, YY
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (12) : 7129 - 7138
  • [29] Three-dimensional proximity effect correction for multilayer structures in electron beam lithography
    Ogino, K
    Hoshino, H
    Machida, Y
    Osawa, M
    Arimoto, H
    Maruyamai, T
    Kawamura, E
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (6B): : 3762 - 3766
  • [30] Surface profile effect on the backscattering electron spectrum
    Zaitsev, SI
    Yakimov, EB
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1997, 61 (10): : 1954 - 1958
12345