X-RAY ANALYSIS OF STRAIN IN TITANIUM NITRIDE LAYERS.

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作者：
Valvoda, V. [1 ]
Musil, J. [1 ]
机构：
[1] Charles Univ, Prague, Czech, Charles Univ, Prague, Czech
来源：
Thin Solid Films | 1987年 / 149卷 / 01期
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页码：49 / 60
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