Mechanical deformation of PZT thin films for MEMS applications

被引：0
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作者：
Bahr, D.F. [1 ]
Robach, J.S. [1 ]
Wright, J.S. [1 ]
Francis, L.F. [1 ]
Gerberich, W.W. [1 ]
机构：
[1] Washington State Univ, Pullman, WA, United States
来源：
Materials Science and Engineering A | 1999年 / A259卷 / 01期
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页码：126 / 131
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