STO films' research with a HRXRD

被引：0

作者：

Ji, Hong ^{[1
]}

Zuo, Chang-Ming ^{[1
]}

He, Shi-Ming ^{[1
]}

Xiong, Jie ^{[1
]}

Li, Yan-Rong ^{[1
]}

机构：

[1] Sch. of Micro-electronics, Univ. of Electron. Sci. and Technol., Chengdu 610054, China

来源：

Gongneng Cailiao/Journal of Functional Materials | 2004年 / 35卷 / SUPPL.期

关键词：

High resolution X ray diffractometer (HRXRD) - SrTiO films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：3311 / 3313

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