Experiments of submicron structures imaging with soft X-rays

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作者：
Artyukov, I.A.
Vinogradov, A.V.
Kondratenko, V.V.
Fedorenko, A.I.
Yulin, S.A.
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Mikroelektronika | / 25卷 / 01期
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页码：54 / 59
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