Nature of metallic contamination on various silicon substrates

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作者：
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University [1 ]
不详 [2 ]
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来源：
IEICE Transactions on Electronics | 2000年 / E83-C卷 / 10期
关键词：
Crystalline silicon - Native oxide;
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页码：1839 / 1845
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