Nature of metallic contamination on various silicon substrates

被引：0
|
作者：
Department of Electronic Engineering, Graduate School of Engineering, Tohoku University [1 ]
不详 [2 ]
机构：
来源：
IEICE Transactions on Electronics | 2000年 / E83-C卷 / 10期
关键词：
Crystalline silicon - Native oxide;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1839 / 1845
相关论文
共 50 条
  • [1] The nature of metallic contamination on various silicon substrates
    Choi, GM
    Morita, H
    Kim, JS
    Ohmi, T
    IEICE TRANSACTIONS ON ELECTRONICS, 1999, E82C (10) : 1839 - 1845
  • [2] Metallic contamination in silicon processing
    Gorodokin, V
    Zemlyanov, D
    2004 23RD IEEE CONVENTION OF ELECTRICAL AND ELECTRONICS ENGINEERS IN ISRAEL, PROCEEDINGS, 2004, : 157 - 160
  • [3] Metallic contamination assessment of Silicon wafers
    Joly, JP
    MICROELECTRONIC ENGINEERING, 1998, 40 (3-4) : 285 - 294
  • [4] Detection and identification of organic contamination on silicon substrates
    Roche, A.
    Marthon, S.
    Ple, J.F.
    Rochat, N.
    Danel, A.
    Olivier, M.
    Juhel, M.
    Tardif, F.
    2000, Scitec Publications Ltd., Zurich (76-77)
  • [5] Detection and identification of organic contamination on silicon substrates
    Roche, A
    Marthon, S
    Ple, JF
    Rochat, N
    Danel, A
    Olivier, M
    Juhel, M
    Tardif, F
    ULTRA CLEAN PROCESSING OF SILICON SURFACES 2000, 2001, 76-77 : 111 - 114
  • [6] Nature of germanium nanowire heteroepitaxy on silicon substrates
    Jagannathan, Hemanth
    Deal, Michael
    Nishi, Yoshio
    Woodruff, Jacob
    Chidsey, Christopher
    McIntyre, Paul C.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (02)
  • [7] Diffusion degradation of carbon coatings on various metallic substrates
    Straumal, B
    Vershinin, N
    Asrian, A
    Friesel, M
    DIFFUSION, SEGREGATION AND STRESSES IN MATERIALS, 2003, 216-2 : 323 - +
  • [8] Wettability and reactivity of molten silicon with various substrates
    Z. Yuan
    W.L. Huang
    K. Mukai
    Applied Physics A, 2004, 78 : 617 - 622
  • [9] Nucleation properties of undercooled silicon at various substrates
    Appapillai, Anjuli T.
    Sachs, Christoph
    Sachs, Emanuel M.
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (08)
  • [10] Wettability and reactivity of molten silicon with various substrates
    Yuan, Z
    Huang, WL
    Mukai, K
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 78 (04): : 617 - 622
12345