Low-pressure Plasma Processes in Semiconductor Industry.

被引：0
|
作者：
Bell, G.
机构：
来源：
Elektronik Produktion & Prueftechnik | 1982年 / 11期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
PLASMAS - Applications
引用
收藏
页码：741 / 744
相关论文
共 50 条
  • [21] PRETREATMENT OF POLYMER WITH LOW-PRESSURE PLASMA
    LIEBEL, G
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C358 - C358
  • [22] OSCILLATIONS OF A LOW-PRESSURE INHOMOGENEOUS PLASMA
    KOVRIZHNYKH, LM
    RUKHADZE, AA
    SILIN, VP
    SOVIET PHYSICS JETP-USSR, 1963, 17 (06): : 1314 - 1320
  • [23] Low-pressure plasma deposition of tungsten
    Cai, W.
    Liu, H.
    Sickinger, A.
    Muehlberger, E.
    Bailey, D.
    Lavernia, E.J.
    1600, ASM International, Materials Park, OH, United States (03):
  • [24] LOW-PRESSURE SOURCE OF NONEQUILIBRIUM PLASMA
    PROTASEVICH, ET
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1986, 29 (05) : 1151 - 1153
  • [25] Low-pressure hydrogen plasma generators
    Lasgorceix, P., 1600, (04):
  • [26] THE ROLE OF THE PLASMA IN THE CHEMISTRY OF LOW-PRESSURE PLASMA ETCHERS
    HARVEY, REP
    HITCHON, WNG
    PARKER, GJ
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1995, 23 (03) : 436 - 452
  • [27] Low-pressure cold plasma sterilization at atmospheric pressure
    Moisan, M
    Barbeau, J
    Pelletier, J
    Saoudi, B
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2002, 57 (303): : 71 - +
  • [28] THERMAL CONTROL OF LOW-PRESSURE FRACTIONATION PROCESSES
    USSELMAN, TM
    HODGE, DS
    JOURNAL OF VOLCANOLOGY AND GEOTHERMAL RESEARCH, 1978, 4 (3-4) : 265 - 281
  • [29] A STUDY OF LOW-PRESSURE PARTICLE IMPACTION PROCESSES
    JURCIK, BJ
    BROCK, JR
    TRACHTENBERG, I
    JOURNAL OF AEROSOL SCIENCE, 1989, 20 (06) : 701 - 711
  • [30] PRIMARY PROCESSES IN THE LOW-PRESSURE PYROLYSIS OF METHYLSILANE
    DAVIDSON, IMT
    RING, MA
    JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1980, 76 : 1520 - 1525
12345