Controlled topography production - true 3D simulation and experiment

被引：0
|
作者：
Jonsson, L.B. [1 ]
Hedlund, C. [1 ]
Katardjiev, I.V. [1 ]
Barklund, A.M. [1 ]
Blom, H.-O. [1 ]
Berg, S. [1 ]
机构：
[1] Uppsala Univ, Uppsala, Sweden
来源：
Vacuum | 1995年 / 46卷 / 8-10期
关键词：
Huygens reconstruction formalism - Ion beam etching - Software Package DINESE - Surface evolution - Topography;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：971 / 975
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