Optical emission characterization of CH4+H2 discharges for diamond deposition

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[1] Gomez-Aleixandre, C.
[2] Sanchez, O.
[3] Castro, A.
[4] Albella, J.M.
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Gomez-Aleixandre, C. | 1600年 / American Inst of Physics, Woodbury, NY, United States卷 / 74期
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