Diffusion of iron in the silicon dioxide layer of silicon-on-insulator structures

被引：0

|

作者：

机构：

来源：

Appl Phys Lett | / 9卷 / 1206期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

收藏

相关论文

共 50 条

[31] Color variations of silicon-on-insulator wafers with silicon device layer thickness
Seely, John f.
OPTICS EXPRESS, 2025, 33 (02): : 3205 - 3213
[32] A TWO-DIMENSIONAL ANALYTICAL SOLUTION OF THE DIFFUSION EQUATION FOR SILICON-ON-INSULATOR STRUCTURES
SWEID, I
GUILLEMOT, N
KAMARINOS, G
JOURNAL OF APPLIED PHYSICS, 1988, 63 (12) : 5633 - 5637
[33] A TWO-DIMENSIONAL ANALYTICAL RESOLUTION OF THE DIFFUSION EQUATION FOR SILICON-ON-INSULATOR STRUCTURES
SWEID, I
GUILLEMOT, N
KAMARINOS, G
REVUE DE PHYSIQUE APPLIQUEE, 1988, 23 (06): : 1111 - 1116
[34] Boron diffusion profiles in ultrathin silicon-on-insulator structures and their relation to crystalline quality
Uchiday, H
Ichimura, M
Arai, E
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (7A): : 4436 - 4441
[35] Boron diffusion profiles in ultrathin silicon-on-insulator structures and their relation to crystalline quality
Uchida, H., 1600, Japan Society of Applied Physics (41):
[36] Diffusion of iron in silicon dioxide
Ramappa, DA
Worth, WB
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (10) : 3773 - 3777
[37] Pore formation on the silicon-metal interface in silicon-on-insulator structures
Akimov, AG
Barabanenkov, MY
Mordkovich, VN
JOURNAL OF APPLIED PHYSICS, 1998, 83 (12) : 7625 - 7627
[38] Ion Synthesis of Silicon-on-Insulator Structures with a Lead-Silicate Insulating Layer
E. Yu. Buchin
Yu. I. Denisenko
Technical Physics Letters, 2021, 47 : 696 - 699
[39] A new process for the fabrication of silicon-on-insulator structures by using porous silicon
Chang, CC
Chen, LC
MATERIALS LETTERS, 1997, 32 (04) : 287 - 290
[40] Design of Plasmonic Modulators with Vanadium Dioxide on Silicon-On-Insulator
Sun, M.
Shieh, W.
Unnithan, R. R.
30TH ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC), 2017, : 75 - 83

← 1 2 3 4 5 →