Electrical properties of oxynitride thin films using noise and charge pumping measurements

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作者
Masson, P. [1 ,2 ]
Morfouli, P. [1 ]
Autran, J.L. [2 ]
Brini, J. [1 ]
Balland, B. [2 ]
Vogel, E.M. [3 ]
Wortman, J.J. [3 ]
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[1] LPCS, ENSERG, BP 257, 38016 Grenoble, France
[2] LPM, INSA de Lyon, Bâtiment 502, 69621 Villeurbanne, France
[3] DECE, NCSU, 404 Daniels Hall, Box 7911, Raleigh, NC 27695-711, United States
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页码:54 / 58
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