AUTOMATIC FLATNESS TESTING USING A FIZEAU INTERFEROMETER.

被引：0
|
作者：
Yatagai, Toyohiko [1 ]
Inabu, Shigeru [1 ]
Suzuki, Masane [1 ]
机构：
[1] Univ of Tsukuba, Inst of Applied, Physics, Ibaraki, Jpn, Univ of Tsukuba, Inst of Applied Physics, Ibaraki, Jpn
来源：
Test & measurement world | 1985年 / 5卷 / 09期
关键词：
AUTOMATIC FLATNESS TESTING - FIZEAU INTERFEROMETER - SILICON WAFERS FLATNESS;
D O I：
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学科分类号：
摘要：
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页码：70 / 82
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