SARISA - FOR THOSE DIFFICULT TO DETECT SPUTTERED ATOMS.

被引：0
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作者：
Gruen, D.M.
Pellin, M.J.
Young, C.E.
Calaway, W.F.
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来源：
Research and Development (Barrington, Illinois) | 1984年 / 26卷 / 03期
关键词：
ION BEAMS - LASERS - Applications - SPUTTERING - VACUUM TECHNOLOGY;
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摘要：
Surface analysis by resonance ionization of sputtered atoms (SARISA) shows promise as a high-sensitivity technique. The SARISA system promises a sensitivity increase of at least three orders of magnitude over mass spectrometer-based techniques. The system detects multiphoton ionized atoms directly by extraction into a spiraltron while discriminating against backscattered primary and secondary ions.
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页码：153 / 154
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