SENSITIVE, LOW DAMAGE SURFACE ANALYSIS USING RESONANCE IONIZATION OF SPUTTERED ATOMS.

被引：0
|
作者：
Pellin, M.J. [1 ]
Young, C.E. [1 ]
Calaway, W.F. [1 ]
Burnett, J.W. [1 ]
Jorgensen, B. [1 ]
Schweitzer, E.L. [1 ]
Gruen, D.M. [1 ]
机构：
[1] Argonne Natl Lab, Argonne, IL, USA, Argonne Natl Lab, Argonne, IL, USA
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B18卷 / 4-6期
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18
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页码：446 / 451
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