Application of ion-beam-sputtered Al films to ultrathin surface acoustic wave devices

被引：0
|
作者：
Kamijo, Atsushi [1 ]
Mitsuzuka, Tsutomu [1 ]
Yamamoto, Yasushi [1 ]
Tomotsune, Kaoru [1 ]
Tamichi, Shigeru [1 ]
机构：
[1] NEC Corp, Kanagawa, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 5 B期
关键词：
Acoustic surface wave devices;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：2346 / 2350
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