Composition of evaporated boron nitride films by carbon dioxide and excimer laser

被引：0
|
作者：
Kaneda, Kayo [1 ]
Shibata, Kimihiro [1 ]
机构：
[1] Nissan Motor Co, Ltd, Yokosuka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 12 A期
关键词：
Vapor deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
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页码：5652 / 5655
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