Strain imaging of lead-zirconate-titanate thin film by tunneling acoustic microscopy

被引：0
|
作者：
Keiji, Takata [1 ]
Keiko, Kushida [1 ]
Kazuyoshi, Torii [1 ]
Hiroshi, Miki [1 ]
机构：
[1] Hitachi Ltd, Saitama, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 5 B期
关键词：
Electric fields - Imaging techniques - Lead compounds - Piezoelectric materials - Piezoelectricity - Polarization - Strain - Thin films - Vibrations (mechanical);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents a new method for imaging of the piezoelectric property of piezoelectric films with high resolution using tunneling acoustic microscopy. This method is based on detecting fine strains generated by the tip voltage. Such strain is detected either through the surface displacement of the piezoelectric film or through a vibration generated in the film. This method enables us to measure and image the piezoelectric constants, polarization directions, and coercive electric fields of piezoelectric materials.
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页码：3193 / 3196
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