Effect of processing parameters on the microstructure and mechanical properties of TiN film on stainless steel by HCD ion plating

被引：0
|
作者：
Huang, J.-H. [1 ]
Tsai, Y.-P. [1 ]
Yu, G.-P. [1 ]
机构：
[1] Natl Tsing Hua Univ, Hsinchu, Taiwan
来源：
Thin Solid Films | 1999年 / 355卷
关键词：
Number:; 88-2212-E007-042; Acronym:; NSC; Sponsor: National Science Council;
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页码：440 / 445
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