Platinum bottom electrodes formed by electron-beam evaporation for high-dielectric thin films

被引：0
|
作者：
Cha, Seon Yong [1 ]
Lee, Hee Chul [1 ]
Lee, Won Jae [1 ]
Kim, Ho Gi [1 ]
机构：
[1] Korea Advanced Inst of Science and, Technology, Taejon, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1995年 / 34卷 / 9 B期
关键词：
11;
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页码：5220 / 5223
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