共 50 条
- [42] Comparison of nickel and iron gettering in Cz silicon wafers GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, 2002, 82-84 : 367 - 371
- [43] Sacrificial High-Temperature Phosphorus Diffusion Gettering Process for Lifetime Improvement of Multicrystalline Silicon Wafers 2014 IEEE 40TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2014, : 3014 - 3016
- [46] INTRINSIC GETTERING OF IRON IMPURITIES IN SILICON-WAFERS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (12B): : 3580 - 3583
- [47] Efficiency of cavity gettering in single and in multicrystalline silicon wafers MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 71 : 229 - 232
- [50] GOLD SOLUBILITY IN SILICON AND GETTERING BY PHOSPHORUS PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1978, 48 (02): : 523 - 532