PLATINUM SILICIDES FORMATION OF HEAVILY DOPED SILICON BY ION MIXING.

被引：0
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作者：
Vasiljev, S.V. [1 ]
Gerasimenko. N. N. [1 ]
Kalinin, V.V. [1 ]
Kulikauskas, V.S. [1 ]
机构：
[1] Acad of Sciences of the USSR, Novosibirsk, USSR, Acad of Sciences of the USSR, Novosibirsk, USSR
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B19-20卷 / pt 2 Feb III期
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页码：749 / 752
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