共 50 条
- [21] Stress relaxation in dual-damascene cu interconnects to suppress stress-induced voiding PROCEEDINGS OF THE IEEE 2003 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2003, : 210 - 212
- [22] Interfacial stress characterization for stress-induced voiding in Cu/Low-k interconnects IPFA 2005: PROCEEDINGS OF THE 12TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS, 2005, : 96 - 99
- [23] New degradation pbenomena of stress-induced voiding inside via in copper interconnects 2007 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 45TH ANNUAL, 2007, : 638 - +
- [27] Investigation of stress-induced voiding inside and under vias in copper interconnects with "wing" pattern 2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL, 2008, : 683 - +
- [28] Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects STRESS-INDUCED PHENOMENA IN METALLIZATION, 2009, 1143 : 20 - +
- [29] Stress-induced voiding in multi-level copper/Low-k interconnects 2004 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS, 2004, : 240 - 245
- [30] Grain boundary misorientation angles and stress-induced voiding in oxide passivated copper interconnects Appl Phys Lett, 10 (1242):