ANALYSIS OF CARBON CONTENT AND DISTRIBUTION IN a-Si1 - xCx:H FILMS BY RESONANT SCATTERING.

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作者：
Sie, S.H. [1 ]
McKenzie, D.R. [1 ]
Smith, G.B. [1 ]
Ryan, C.G. [1 ]
机构：
[1] CSIRO, North Ryde, Aust, CSIRO, North Ryde, Aust
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1985年 / B15卷 / 1-6期
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页码：632 / 635
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